Microstructures using RF sputtered PSG film as a sacrificial layer in surface micromachining
نویسندگان
چکیده
منابع مشابه
Water-soluble sacrificial layers for surface micromachining.
This manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95-150 degrees C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or ...
متن کاملReleasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
This paper presents a successful method for releasing high aspect ratio SU-8 micro-structures by the use of positive photoresist (AZ 4620) as sacrificial layer. The AZ 4620 photoresist sacrificial layer was dissolved by the SU-8 developer (propylene glycol monomethyl ether acetate). Thus, this process reduces the need for complex microfabrication steps and equipments which are otherwise require...
متن کاملThick-layer resists for surface micromachining
Interest in thick-photoresist applications is steadily growing. In addition to bump fabrication and wire interconnect technology (WIT), the process of patterning thick-layer photoresists by UV lithography is specially qualified for applications in microelectromechanical systems (MEMS). Specialized equipment and new photoresists have been developed or are under development to cope with the new c...
متن کاملFabrication of Suspended Polymer Microstructures Using Sacrificial Layer Micromolding and Patterned Substrate Micromolding
Two soft lithography based fabrication techniques were employed for fabricating mechanically independent, freely suspended polymer microstructure from poly(n-propyl methacrylate) (PPMA) and poly(methyl methacrylate) (PMMA). Both methods involve a micromolding process followed by thermal bonding to the substrate. The first method, sacrificial layer micromolding, uses a water-soluble sacrificial ...
متن کاملMEMS prototyping using RF sputtered films
In the present work, the deposition and characterization of dielectric, piezoelectric, semiconductor and conductor films by RF diode / RF magnetron sputtering process for applications in MEMS fabrication have been reported. Thin films of silicon dioxide, silicon nitride, amorphous silicon, zinc oxide and lanthanum doped lead zirconate titanate (PLZT) were prepared by RF sputtering process and e...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sadhana
سال: 2009
ISSN: 0256-2499,0973-7677
DOI: 10.1007/s12046-009-0033-x